The field of cantilever-based sensing emerged in the mid-1990s and is today a well-known
technology for label-free sensing which holds promise as a technique for cheap, portable …

This paper is a review of the remarkable progress that has been made during the past few
decades in design, modeling, and fabrication of micromachined resonators. Although micro …

Frequency stability is key to the performance of nanoresonators. This stability is thought to
reach a limit with the resonator's ability to resolve thermally induced vibrations. Although …

Micromechanical devices comprise emerging sensor platforms with straightforward sensing
mechanisms. Molecular adsorption onto the sensing element, typically a cantilever, shifts its …

Abstract 2D materials‐based nanoelectromechanical resonant systems with high sensitivity
can precisely trace quantities of ultra‐small mass molecules and therefore are broadly …

We propose how to achieve strong phonon blockade (PB) in a hybrid spin-mechanical
system in the weak-coupling regime. We demonstrate the implementation of magnetically …

This letter presents the design, fabrication, and demonstration of a CMOS/
microelectromechanical system (MEMS) electrostatically self-excited resonator based on a …

Building on the invention of the transistor by Brattain and Bardeen, 1 an enormous amount
of research in semiconductors and integrated circuits (ICs) has established the modern …

Nanomechanical resonators have been monolithically integrated on preprocessed
complementary metal-oxide-semiconductor (CMOS) chips. Fabricated resonator systems …

Integration of electrostatically driven and capacitively transduced MEMS resonators in
commercial CMOS technologies is discussed. A figure of merit to study the performance of …