Laser system
DJW Brown, WN Partlo, RL Sandstrom - US Patent 7,715,459, 2010 - Google Patents
An apparatus/method which may comprise: a very high power line narrowed lithography
laser light source which may comprise: a solid state seed laser system which may comprise …
laser light source which may comprise: a solid state seed laser system which may comprise …
Laser system
AI Ershov, WN Partlo, DJW Brown… - US Patent …, 2011 - Google Patents
A method and apparatus may comprise a line narrowed pulsed excimer or molecular
fluorine gas discharge laser system which may comprise a seed laser oscillator producing …
fluorine gas discharge laser system which may comprise a seed laser oscillator producing …
Laser system
DJW Brown, WN Partlo, RL Sandstrom - US Patent 7,920,616, 2011 - Google Patents
Provisional application No. 60/814.293, filed on Jun. A method/apparatus may comprise a
laser light source which 16, 2006, provisional application No. 60/814,424, may comprise a …
laser light source which 16, 2006, provisional application No. 60/814,424, may comprise a …
Laser system
DJW Brown, WN Partlo, RL Sandstrom - US Patent 7,643,529, 2010 - Google Patents
Related US Application Data OTHER PUBLICATIONS (63) Continuation-in-part of
application No. 1 1/787,180, Buczek, etal,“C02 Regenerative Ring Power Amplifiers,” …
application No. 1 1/787,180, Buczek, etal,“C02 Regenerative Ring Power Amplifiers,” …
Laser system
AI Ershov, WN Partlo, DJW Brown… - US Patent …, 2010 - Google Patents
A method and apparatus may comprise a line narrowed pulsed excimer or molecular
fluorine gas discharge laser system which may comprise a seed laser oscillator producing …
fluorine gas discharge laser system which may comprise a seed laser oscillator producing …
Laser system
DJW Brown, WN Partlo, RL Sandstrom - US Patent App. 11/980,288, 2009 - Google Patents
A method and apparatus may comprise a laser light source system which may comprise a
solid state laser seed beam source providing a seed laser output; a frequency conversion …
solid state laser seed beam source providing a seed laser output; a frequency conversion …
Laser system
AI Ershov, WN Partlo, DJW Brown… - US Patent …, 2011 - Google Patents
Related US Application Data Continuation-in-part of application No. 1 1/787,180, filed on
Apr. 13, 2007, now Pat. No. 7,885,309, which is a continuation-in-part of application No. 1 …
Apr. 13, 2007, now Pat. No. 7,885,309, which is a continuation-in-part of application No. 1 …
Laser system
DJW Brown, WN Partlo, RL Sandstrom - US Patent 8,144,740, 2012 - Google Patents
An apparatus/method may comprise a line narrowed pulsed lithography laser light source
which may comprise: a seed pulse providing laser system which may comprise: a first …
which may comprise: a seed pulse providing laser system which may comprise: a first …
Laser system
AI Ershov, WN Partlo, DJW Brown… - US Patent …, 2010 - Google Patents
(57) ABSTRACT A method/apparatus may comprise a seed laser oscillator producing an
output which may comprise: a first gas dis charge excimer or molecular fluorine laser …
output which may comprise: a first gas dis charge excimer or molecular fluorine laser …
Laser system
AI Ershov, WN Partlo, DJW Brown… - US Patent …, 2009 - Google Patents
(60) Provisional application No. 60/732,688, filed on Nov. 1, 2005, provisional application
No. 60/814.293, filed on Jun. 16, 2006, provisional application No. 60/814, A …
No. 60/814.293, filed on Jun. 16, 2006, provisional application No. 60/814, A …