Microdroplet-tin plasma sources of EUV radiation driven by solid-state-lasers (Topical Review)
Plasma produced from molten-tin microdroplets generates extreme ultraviolet light for state-
of-the-art nanolithography. Currently, CO 2 lasers are used to drive the plasma. In the future …
of-the-art nanolithography. Currently, CO 2 lasers are used to drive the plasma. In the future …
Review of the 1st EUV Light Sources Code Comparison Workshop
We review the results of the 1 st Extreme Ultraviolet (EUV) Light Sources Code Comparison
Workshop. The goal of this workshop was to provide a platform for specialists in EUV light …
Workshop. The goal of this workshop was to provide a platform for specialists in EUV light …
Early-time hydrodynamic response of a tin droplet driven by laser-produced plasma
J Hernandez-Rueda, B Liu, DJ Hemminga… - Physical Review …, 2022 - APS
We experimentally and numerically investigate the early-time hydrodynamic response of tin
microdroplets driven by a ns-laser-induced plasma. Experimentally, we use stroboscopic …
microdroplets driven by a ns-laser-induced plasma. Experimentally, we use stroboscopic …
Mass partitioning in fragmenting tin sheets
We experimentally study the mass partitioning of a fragmenting liquid sheet formed after the
impact of a ns-laser pulse on a tin microdroplet, and its dependence on laser pulse energy …
impact of a ns-laser pulse on a tin microdroplet, and its dependence on laser pulse energy …
Characterization of angularly resolved EUV emission from 2-µm-wavelength laser-driven Sn plasmas using preformed liquid disk targets
The emission properties of tin plasmas, produced by the irradiation of preformed liquid tin
targets by several-ns-long 2 µm-wavelength laser pulses, are studied in the extreme …
targets by several-ns-long 2 µm-wavelength laser pulses, are studied in the extreme …
Material-specific high-order harmonic generation in laser-produced plasmas for varying plasma dynamics
We present a new experimental setup for high-order harmonic generation in laser-produced
plasmas, allowing the generation of coherent VUV and EUV light, as well as characterisation …
plasmas, allowing the generation of coherent VUV and EUV light, as well as characterisation …
[HTML][HTML] The transition from short-to long-timescale pre-pulses: Laser-pulse impact on tin microdroplets
We experimentally study the interaction of intense laser pulses with metallic microdroplets
and the resulting deformation. Two main droplet deformation regimes have previously been …
and the resulting deformation. Two main droplet deformation regimes have previously been …
[HTML][HTML] Laser-induced vaporization of a stretching sheet of liquid tin
We experimentally study the mass distribution of a sheet of liquid tin formed by the impact of
a ns-laser pulse on a spherical microdroplet. The mass distribution is obtained using a low …
a ns-laser pulse on a spherical microdroplet. The mass distribution is obtained using a low …
[HTML][HTML] High-resolution spectroscopic imaging of atoms and nanoparticles in thin film vaporization
We introduce a spectroscopic absorption imaging method in the UV regime (225–400 nm) to
study tin vapor created by irradiating a thin film with a low intensity 10 8 W cm− 2 …
study tin vapor created by irradiating a thin film with a low intensity 10 8 W cm− 2 …
Speed of fragments ejected by an expanding liquid tin sheet
We experimentally investigate the speed of fragments produced by ligament breakup in the
laser-induced deformation of tin microdroplets into axisymmetric sheets. The experiments …
laser-induced deformation of tin microdroplets into axisymmetric sheets. The experiments …