The rapid development of the fifth-generation mobile networks (5G) and Internet of Things
(IoT) is inseparable from a large number of miniature, low-cost, and low-power sensors and …

Since two decades piezoelectric MEMS resonator research has been making a headway by
leaps and bounds in multiple fronts such as micro/nanofabrication techniques, device and …

This paper is concerned with the accurate free vibration and buckling analysis of a partially
or internally cracked natural fiber reinforced composite (NFRC) plate with corner point …

A novel class of nanoplate-based mass sensor with corner point supports for detecting
attached nanoparticles is proposed. Exact solutions for vibrations of three types of …

In this work, a scandium-doped aluminum nitride (ScAlN)-based piezoelectric breathing
mode dual-ring resonator with high temperature stability is presented. The designed …

We report a highly sensitive and miniature in-plane resonant Lorentz-force magnetic micro-
sensor operating in air at atmospheric pressure. The concept is based on the detection of …

This work presents a single-structure 3-axis Lorentz force magnetometer (LFM) based on an
AlN-on-Si MEMS resonator. The operation of the proposed LFM relies on the flexible …

In this paper, we experimentally investigate selective actuation of the first few higher-order
modes of a micromachined silicon nitride circular membrane (micro drum), which is actuated …

Restricted by the shapes of utilized resonance structures, conventional Lorentz-force micro-
electro-mechanical systems (MEMS) magnetometers are rarely designed with the multiturn …

摘要随着智能时代的到来, 磁场传感器已经广泛应用于移动设备中, 为用户提供定位和导航等
服务. 目前, 基于霍尔效应的磁场传感器和基于磁性材料的磁阻式传感器是人们普遍采用的2 …