Resonant rotational scanning micromirrors with electrostatic comb-drive actuators are widely
used in generating structured lights for 3D sensing, but their resonant scanning stability is …

The maximum scan angle amplitude of resonating micro-mirrors, intended for micro-
projection display applications is limited by air damping. Three-dimensional transient Navier …

Squeezed air film between two closely spaced vibrating microstructures is the important
source of energy dissipation and has profound effects on the dynamics of …

This paper introduces the design and manufacturing technology of aerospace
microelectromechanical systems (MEMS) characterized by high performance, multi-variety …

Squeeze film damping is an important factor in the dynamic stability of the bi‐axial
microelectromechanic systems. The purpose of this article is to provide an analytical solution …

In order to identify the influence of the vacuum environment on the performance of a comb-
drive microscanner, and indicate the optimum pressure for enhancing its performance, a …

Accurate determination of squeeze-film damping (SFD) plays an important role in the design
of high-Q microresonators. Many analytical models for predicting SFD on the microplate …

The maximum scanning amplitude achievable by resonating micro-mirrors intended for
micro-projection display applications is a function of air damping. Simplified analytical …

An acoustic signal is usually produced when the MEMS scanning mirror is working. In this
paper, the acoustic signal is proposed to be used as the feedback signal of MEMS scanning …

Abstract MEMS (Micro-Electro-Mechanical Systems) applied to optical scanning systems
have the ability to modulate light using a miniaturised system and have driven several …