De-embedding techniques for nanoscale characterization of semiconductors by scanning microwave microscopy
The paper presents a methodology for de-embedding scanning microwave microscopy
(SMM) measurements, mainly for semiconductor characterization. Analytical modeling, a …
(SMM) measurements, mainly for semiconductor characterization. Analytical modeling, a …
Scanning microwave microscopy for nanoscale characterization of semiconductors: De-embedding reflection contact mode measurements
L Michalas, A Lucibello, G Badino… - 2015 European …, 2015 - ieeexplore.ieee.org
A methodology towards de-embedding contact mode scanning microwave microscopy
(SMM) reflection measurements is presented. A calibration standard that consists of …
(SMM) reflection measurements is presented. A calibration standard that consists of …