[HTML][HTML] Electron scattering at interfaces in epitaxial W (001)–Mo (001) multilayers

P Shen, D Gall - Journal of Applied Physics, 2024 - pubs.aip.org
Epitaxial W–Mo multilayers are employed as a model system to demonstrate how resistivity
measurements parallel to metal–metal interfaces can be used to quantify the specific …

Resistivity size effect in epitaxial VNi2 layers

M Zhang, D Gall - Journal of Applied Physics, 2023 - pubs.aip.org
Epitaxial VNi 2 layers are deposited onto MgO (001) and their resistivity ρ measured as a
function of layer thickness d= 10.5–138 nm to quantify the resistivity size effect. The layers …

Size effect of resistivity due to surface roughness scattering in alternative interconnect metals: Cu, Co, Ru, and Mo

C Hu, Y Zhang, Z Chen, Q Zhang, J Zhu, S Hu, Y Ke - Physical Review B, 2023 - APS
The resistivity size effect of thin films due to atomically rough surfaces is investigated using
first-principles quantum transport simulations with the disorder scattering treated by the …

Resistivity size effect in epitaxial face-centered cubic Co (001) layers

A Thakral, A Jog, D Gall - Applied Physics Letters, 2024 - pubs.aip.org
Metastable face-centered cubic (fcc) Co layers are deposited by reactive magnetron
sputtering in 5 mTorr N 2 at 400 C followed by vacuum annealing at 500 C. The resulting …

Molybdenum Thin Film Formation from Molybdenum Nitride Deposited by Plasma-enhanced Atomic Layer Deposition with Hydrogen-permeable Mechanical Capping …

JH Park, YW Kim, MH Kim, JS Kim… - ACS Applied Electronic …, 2023 - ACS Publications
In this study, we developed a Mo metal thin film deposition process consisting of two steps:
Mo2N thin film deposition using plasma-enhanced atomic layer deposition, followed by …

Size-dependent thermal transport properties of advanced metallic nanowire interconnects

A Wang, H Bao - Applied Physics Letters, 2024 - pubs.aip.org
Thermal transport properties of metallic nanowires are crucial to the near-junction heat
dissipation of transistors. However, the understanding of the size-dependent thermal …

Controllable synthesis and structure analysis of VCxO1-x solid solution by experiment and first-principles calculation

J An, M Wang, J Zhang, Y Jia, B Feng, L Dai… - Ceramics International, 2023 - Elsevier
Vanadium oxycarbide (ie VC x O 1-x) solid solution was expected to be a novel and
promising ceramic materials in energy storage, catalysis and the preparation of metallic …

CuTi as Potential Liner-and Barrier-Free Interconnect Conductor

M Zhang, D Gall - IEEE Transactions on Electron Devices, 2024 - ieeexplore.ieee.org
CuTi layers are co-sputter deposited on 20-nm SiO2/Si (001) wafers at 350° C to quantify
their stability in direct contact with a dielectric and to explore the potential of CuTi as barrier …

Numerical evaluation of grain boundary electron scattering in molybdenum thin films: A critical analysis for advanced interconnects

SH Joo, D Choi - Vacuum, 2024 - Elsevier
We present a methodology for numerically evaluating grain boundary scattering in
polycrystalline molybdenum (Mo) thin films. Two types of Mo films (an epitaxially grown …

Electron Scattering at Ru–TiN–Ru Interface Stacks

P Shen, D Gall - IEEE Transactions on Electron Devices, 2024 - ieeexplore.ieee.org
Electron transport across Ru-TiN–Ru interfaces is quantified using multilayers containing
five 10-nm-thick Ru (0001) layers separated by TiN interlayers with nominal thicknesses …