Sub-10 μHz/√ Hz Measurement Instrumentation for 140-dB DR Frequency-Modulated MEMS Sensors

Epitaxial Polysilicon MEMS Temperature Sensor with 0.043° C Resolution at 4-Hz Data Rate

P Frigerio, A Fagnani, V Zega, G Gattere… - IEEE Sensors …, 2024 - ieeexplore.ieee.org
This work discloses a temperature sensor based on a polysilicon microelectromechanical
systems (MEMS) resonator. The system exploits the temperature drift of the resonance …
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