Optical emission spectroscopy applied to non-equilibrium plasmas in molecular gases can
give important information on basic plasma parameters, including the rotational and …

The high-resolution photoelectron energy spectra of atomic titanium and its hydride anions
were obtained on a slow-electron velocity-map imaging spectrometer equipped with a cold …

In this Tutorial, various methods of optical spectroscopy representing certain interest for
magnetron discharge characterization are overviewed. The main principles, the …

The objective of this paper is to study the effect of magnetic field strength on spoke
behaviour in a high power impulse magnetron sputtering discharge. In three magnetic field …

A detailed experimental study of high power impulse magnetron sputtering processes is
performed by time-resolved imaging of the ground state sputtered particles. New details …

This paper reflects on the future of low‐temperature plasma science in relation to the
manufacturing and novel uses of glass. The text summarizes the current state of the art on …

The deposition rate, as well as the structure of a coating for a given magnetron sputtered
material are determined by the plasma properties which are significantly dependent on the …

In industrial magnetron sputtering processes, large DC-driven cathodes are commonly
employed. This work reports on industrially compatible technology, which allows for the …

In this paper, the ground state number densities of titanium atom and ion, ionised density
fraction and ionised flux fraction were determined in a high power impulse magnetron …

A detailed experimental study of high power impulse magnetron sputtering discharges is
performed using time-resolved ground state density mapping of the sputtered neutrals and …