Surface-micromachined capacitive RF switches with low actuation voltage and steady contact
In this paper, we report fabrication and dynamic characterization of low-actuation-voltage
capacitive radio frequency microelectromechanical systems (RF MEMS) switches with …
capacitive radio frequency microelectromechanical systems (RF MEMS) switches with …
Design and fabrication of a four-arm-structure MEMS gripper
This paper is focused on the design and fabrication of a four-arm-structure
microelectromechanical systems gripper integrated with sidewall piezoresistive force …
microelectromechanical systems gripper integrated with sidewall piezoresistive force …
High-speed control of electromechanical transduction: Advanced drive techniques for optimized step-and-settle response of MEMS micromirrors
Micro/nanoelectromechanical systems (MEMS/NEMS) provide the engineer with a powerful
set of solutions to a wide variety of technical challenges. However, because they are …
set of solutions to a wide variety of technical challenges. However, because they are …
MEMS residual stress characterization: Methodology and perspective
KS Chen, KS Ou - Handbook of Silicon Based MEMS Materials and …, 2020 - Elsevier
Residual stress characterization in microelectromechanical systems (MEMS) structures is
discussed in this chapter. Residual stress characterization in MEMS structures is of inherent …
discussed in this chapter. Residual stress characterization in MEMS structures is of inherent …
A novel semianalytical approach for finding pull-in voltages of micro cantilever beams subjected to electrostatic loads and residual stress gradients
KS Ou, KS Chen, TS Yang… - Journal of …, 2011 - ieeexplore.ieee.org
Beam structures are widely used in microelectromechanical systems (MEMS) sensors and
actuators, and modeling of pull-in behavior of beams subjected to electrostatic force is …
actuators, and modeling of pull-in behavior of beams subjected to electrostatic force is …
Open-loop control of electrostatic levitation actuators to enhance the travel-range of optical switches
Command shaping is a driving technique for handling the large settling time of the high-Q-
MEMS actuators. The strong nonlinearity due to the electrostatic actuation limits the linear …
MEMS actuators. The strong nonlinearity due to the electrostatic actuation limits the linear …
Fast positioning and impact minimizing of MEMS devices by suppression of motion-induced vibration by command-shaping method
KS Ou, KS Chen, TS Yang… - Journal of …, 2011 - ieeexplore.ieee.org
Electrostatic (ES) force is one of the most important actuation mechanisms for
microelectromechanical systems (MEMS) devices. However, residual vibration of …
microelectromechanical systems (MEMS) devices. However, residual vibration of …
Suppressing residual vibrations in comb-drive electrostatic actuators: A command shaping technique adapted to nomadic applications
Residual vibrations are a recurrent problem in MEMS actuators leading to a limitation of their
dynamics and lifespan. This paper presents a voltage-controlled technique and its …
dynamics and lifespan. This paper presents a voltage-controlled technique and its …
Nonlinear tracking control of vibration amplitude for a parametrically excited microcantilever beam
In this paper, a feedback control algorithm to regulate oscillation amplitude of a
microelectromechanical (MEMS) cantilever beam operated at parametric resonances is …
microelectromechanical (MEMS) cantilever beam operated at parametric resonances is …
Shaped input for reducing crosstalk of two-axis MEMS scanners
K Kim, J Kim, Y Park, SH Kim, JH Lee - Sensors and Actuators A: Physical, 2023 - Elsevier
We have proposed a pre-shaped input method to minimize the crosstalk of two-axis
microelectromechanical system (MEMS) scanners. The mechanical and geometrical …
microelectromechanical system (MEMS) scanners. The mechanical and geometrical …