[HTML][HTML] Review of flexible microelectromechanical system sensors and devices
Today, the vast majority of microelectromechanical system (MEMS) sensors are
mechanically rigid and therefore suffer from disadvantages when used in intimately …
mechanically rigid and therefore suffer from disadvantages when used in intimately …
Review of piezoelectric micromachined ultrasonic transducers for rangefinders
J Pan, C Bai, Q Zheng, H Xie - Micromachines, 2023 - mdpi.com
Piezoelectric micromachined ultrasonic transducer (pMUT) rangefinders have been rapidly
developed in the last decade. With high output pressure to enable long-range detection and …
developed in the last decade. With high output pressure to enable long-range detection and …
A miniaturized transit-time ultrasonic flowmeter based on ScAlN piezoelectric micromachined ultrasonic transducers for small-diameter applications
Y Gao, M Chen, Z Wu, L Yao, Z Tong, S Zhang… - Microsystems & …, 2023 - nature.com
Transit-time ultrasonic flowmeters (TTUFs) are among the most widely used devices for flow
measurements. However, traditional TTUFs are usually based on a bulk piezoelectric …
measurements. However, traditional TTUFs are usually based on a bulk piezoelectric …
Design and characterization of an aluminum nitride-based MEMS hydrophone with biologically honeycomb architecture
L Jia, L Shi, C Liu, Y Yao, C Sun… - IEEE Transactions on …, 2021 - ieeexplore.ieee.org
In this article, we present a high-performance aluminum nitride (AlN)-based
microelectromechanical system (MEMS) hydrophone sensor, in which the sensing cells are …
microelectromechanical system (MEMS) hydrophone sensor, in which the sensing cells are …
Monolithic single PMUT-on-CMOS ultrasound system with+ 17 dB SNR for imaging applications
This article presents a fully integrated ultrasound system based on a single piezoelectric
micromachined ultrasonic transducer (PMUT) monolithically fabricated with a 0.13 μm …
micromachined ultrasonic transducer (PMUT) monolithically fabricated with a 0.13 μm …
PMUT and CMUT devices for biomedical applications: A review
Piezoelectric Micromachined Ultrasonic Transducers (PMUT) and Capacitive
Micromachined Ultrasonic Transducers (CMUT) have seen great developments in recent …
Micromachined Ultrasonic Transducers (CMUT) have seen great developments in recent …
9.5% scandium doped ALN PMUT compatible with pre-processed CMOS substrates
This paper presents an 80 μm squared piezoelectric micromachined ultrasonic transducer
(PMUT) using 9.5% scandium-doped aluminum nitride (AlScN). The improvement in the …
(PMUT) using 9.5% scandium-doped aluminum nitride (AlScN). The improvement in the …
Eye-tracking monitoring based on PMUT arrays
As common and natural activity of human beings, eye movement has been regarded as an
indicator of human physiological and psychological health; eye movement tracking has …
indicator of human physiological and psychological health; eye movement tracking has …
Enhancing AlN PMUTs' acoustic responsivity within a MEMS-on-CMOS process
In this paper, guidelines for the optimization of piezoelectrical micromachined ultrasound
transducers (PMUTs) monolithically integrated over a CMOS technology are developed …
transducers (PMUTs) monolithically integrated over a CMOS technology are developed …
High sound pressure piezoelectric micromachined ultrasonic transducers using sputtered potassium sodium niobate
This work presents air-coupled piezoelectric micromachined ultrasonic transducers (pMUTs)
with high sound pressure level (SPL) under low-driving voltages by utilizing sputtered …
with high sound pressure level (SPL) under low-driving voltages by utilizing sputtered …