A method for monitoring a manufacturing apparatus includes collecting a control signal, of a
controller and a corresponding sensing signal, of the manufacturing apparatus over a …

A sensor-based quantification and analysis system includes an input device including a
plurality of sensors that generate an input based on a force. The input device also includes a …

(57) ABSTRACT A method and assembly for acquiring pressure data. A pressure sensor is
applied to a target surface on an indi vidual. A calibrator and a processing element are in …

A valve includes a valve housing with a valve inlet and valve outlet. A valve member is
disposed between the valve inlet and valve outlet. The valve member is movable between …

4,560,871. A 12, 1985 Bowman et al. 2003. O159735 A1 8, 2003 Barillot et al. 4,617,952. A
10/1986 Fujiwara et al. 2003/0172975 A1 9, 2003 Gilbert et al. 4,695,034. A 9, 1987 Shimizu …

A flow node includes characterized restrictor in series and adjacent with a valve to provide a
primary flow restriction with a minimized volume between the two. A conductance of the …

In one embodiment, a control apparatus for delivery of a process gas includes an inlet
conduit; a valve operably coupled to the inlet conduit and alterable between an open …

A method associated with a valve controller configured to capture dynamic process
conditions for monitoring, diagnosing and maintaining a valve assembly through knowledge …

BACKGROUND Certain industrial processes depend on well-controlled flows of gas. One
example is in the field of semiconductor device manufacturing, which uses a wide variety of …

An apparatus for controlling the flow of a gas, containing a controllable valve, wherein the
position of the valve and the gas pressure upstream of the valve are measured and used in …