This review describes recent experimental developments in the study of nonlinearities for
flexural microelectromechanical systems (MEMS) structures. It includes motivation for …

Exploiting nonlinear characteristics in micro/nanosystems has been a subject of increasing
interest in the last decade. Among others, vigorous intermodal coupling through internal …

MEMS gyroscopes are well known for their outstanding advantages in Cost Size Weight and
Power (CSWaP), which have inspired great research attention in recent years. A higher …

Electrostatic MEMS coriolis vibratory gyroscopes (CVG) are essentially nonlinear because of
the capacitive transducers employed for the excitation and detection of resonance vibration …

Numerical modelling of MicroElectroMechanical Systems (MEMS) resonators is still
attracting increasing interest from the sensors community especially when the nonlinear …

Exploiting multi-mode nonlinear behavior benefits the performance enhancement of
resonant Micro-Electro-Mechanical-Systems (MEMS). Recent developments in nonlinear …

The dynamic performance of a micro-resonator depends on its energy loss mechanism
which is quantified by Q-factor (Quality factor). This paper presents numerical and analytical …

The Electromechanical Amplitude Modulation (EAM) is frequently used to eliminate feed-
through signals between forcer and pick-off electrodes of resonant microstructures …

We demonstrate synchronization between two intrinsically coupled oscillators that are
created from two distinct vibration modes of a single micromachined disk resonator. The …

Piezoelectric devices with integrated actuation and sensing capabilities are often used for
the development of electromechanical systems. The present paper addresses …