Dramatic advancements and adoption of computing capabilities, communication
technologies, and advanced, pervasive sensing have impacted every aspect of modern …

Although uniaxial tensile testing is commonly used to evaluate failure properties of vascular
tissue, there is no established protocol for specimen shape or gripping method. Large …

Centrifugal compressors are widely used for gas lift, re-injection and transport in the oil and
gas industry. Critical compressors that compress flammable gases and operate at high …

The chemical mechanical polishing (CMP) process usually suffers from drift and shift in the
Run-to-Run material removal process due to the wear and replacement of the polishing pad …

Mixed-product production is common practice in semiconductor manufacturing and has
attracted considerable academic attention recently. The main purpose of the mixed-product …

The electro-fused magnesia furnace (EFMF) has complex characteristics, such as strong
nonlinearity and multimodes. In this paper, the between-mode process modeling and …

Time delay is a common phenomenon in robotic systems due to computational requirements
and communication properties between or within high-level and low-level controllers as well …

This paper proposes a new Run-to-Run (R2R) control framework based on deep
deterministic policy gradient (DDPG) for the mixed-product production mode in …

Exponentially weighted moving average run-to-run (EWMA-RtR) controller is frequently
adopted in semiconductor manufacturing process. As a model-based control method, the …

Concerning the high-mixed nature in modern semiconductor manufacturing, the original 'tool-
based'exponentially weighted moving average (EWMA) controller is proved to be unstable …