A review on RF micro-electro-mechanical-systems (MEMS) switch for radio frequency applications

Kurmendra, R Kumar - Microsystem Technologies, 2021 - Springer
This paper is designed to review the MEMS switch by considering key aspects on the basis
of mechanical structure, actuation methods, and types of contact and circuit configurations …

Comprehensive Review of RF MEMS Switches in Satellite Communications

B Shao, C Lu, Y Xiang, F Li, M Song - Sensors, 2024 - mdpi.com
The miniaturization and low power consumption characteristics of RF MEMS (Radio
Frequency Microelectromechanical System) switches provide new possibilities for the …

Migration of adhesive material in electrostatically actuated MEMS switch

IV Uvarov - Microelectronics Reliability, 2021 - Elsevier
Microelectromechanical systems (MEMS) switches are attractive for many applications
including radio frequency and microwave systems, logic devices, acceleration sensing and …

Design and performance analysis of double cantilever type capacitive shunt RF MEMS switch

K Girija Sravani, K Srinivasa Rao, D Prathyusha… - Microsystem …, 2020 - Springer
This paper presents a novel structure of capacitance shunt type RF switch for 5G
applications. The proposed RF MEMS switch is having Cantilever type designed with …

Comparison of mems and fog gyroscopes for daily use in camera stabilizing systems

D Chulkovs, E Grabs, A Ipatovs - 2020 24th International …, 2020 - ieeexplore.ieee.org
The article presents the results of fiber-optical gyroscope (FOG) implementation analysis for
camera stabilization systems. The main point of the research was to determine, whether the …

Multi-contact series type RF MEMS switch with low pull-down voltage for THz band

M Li, H Feng, Y Liu, G Yang, N Zhang… - 2022 IEEE 5th …, 2022 - ieeexplore.ieee.org
Radio frequency Microelectromechanical systems (RF MEMS) switches have gained vast
potential in wireless communication and military fields because of their high linearity, low …

Entwicklung von siliziumbasierten Mikro-Schaltern zur Realisierung von reproduzierbaren Array-Verschaltungen: development of silicon-based micro-switches for the …

M Schwarz - 2021 - publikationen.sulb.uni-saarland.de
In der vorliegenden Arbeit werden skalierbare Mikroschalter auf MEMS-Basis entwickelt.
Der Fokus liegt dabei auf der Ausarbeitung eines reproduzierbaren Waferbasierten …

[PDF][PDF] Entwicklung von siliziumbasierten Mikro-Schaltern zur Realisierung von reproduzierbaren Array-Verschaltungen

M Schwarz - scholar.archive.org
In der vorliegenden Arbeit werden skalierbare Mikroschalter auf MEMS-Basis entwickelt.
Der Fokus liegt dabei auf der Ausarbeitung eines reproduzierbaren Waferbasierten …