On-site routine inspection often remains a manual operation in the semiconductor manufacturing industry because implementing automated solutions can be costly and …
The extremely low-frequency (ELF) and its corresponding electromagnetic field influences the yield of CMOS processes in the foundry, especially for high-end equipment such as …
G Chan, CC Lee, Y Wei… - 2021 IEEE International …, 2021 - ieeexplore.ieee.org
In order to fulfill a great demand of IoT and 5G technology, more and more Semiconductor Fabrication Equipment (SFE) have been manufactured. The fastest and most accurate …