“Nanofabrication” is the process of making functional structures with arbitrary patterns
having minimum dimensions currently defined (more-or-less arbitrarily) to be e100 nm …

Colloidal lithography is a recently emerging field; the evolution of this simple technique is
still in progress. Recent advances in this area have developed a variety of practical routes of …

US6952253B2 - Lithographic apparatus and device manufacturing method - Google
Patents US6952253B2 - Lithographic apparatus and device manufacturing method …

A lithographic projection apparatus is disclosed in which a space between the projection
system and the substrate is filled with a liquid. An edge seal member at least partly …

A map of the surface of a substrate is generated at a measurement station. The substrate is
then moved to where a space between a projection lens and the substrate is filled with a …

DD 221 S63 4f1985 DE 224448 7, 1985 DE 242880 2, 1987 EP OO23231 2, 1981 EP
O418427 3, 1991 EP 10395.11 9, 2000 FR 2474708 T 1981 JP 58-202448 11, 1983 JP 62 …

In a lithographic projection apparatus, a liquid supply system provides liquid in a space
between the final element of the projection system and the substrate of the lithographic …

We present a preliminary study on the feasibility of immersion lithography at 157 nm for
patterning below 70 nm. This technology can enable an enhancement in resolution of∼ …

In a lithographic projection apparatus, a space between an optical element is filled with a
first fluid and a second fluid separated by a transparent plate. The first and second fluids …

(56) References Cited A detector detects liquid in the path of a projection beam or US
PATENT DOCUMENTS alignment beam. A controller then determines which one or more of …