Low-temperature growth of AlN films on magnetostrictive foils for high-magnetoelectric-response thin-film composites

T Nguyen, Y Fleming, P Bender, P Grysan… - … Applied Materials & …, 2021 - ACS Publications
This study reports a strong ME effect in thin-film composites consisting of nickel, iron, or
cobalt foils and 550 nm thick AlN films grown by PE-ALD at a (low) temperature of 250° C …