Directed self-assembly of block copolymers on chemical patterns: A platform for nanofabrication
Directed self-assembly (DSA) of block copolymers (BCPs) on lithographically defined
chemically nanopatterned surfaces (or chemical patterns) combines advantages of …
chemically nanopatterned surfaces (or chemical patterns) combines advantages of …
Resistive random access memory (RRAM) technology: From material, device, selector, 3D integration to bottom-up fabrication
Emerging non-volatile memory technologies are promising due to their anticipated capacity
benefits, non-volatility, and zero idle energy. One of the most promising candidates is …
benefits, non-volatility, and zero idle energy. One of the most promising candidates is …
Directed self-assembly of block copolymers for 7 nanometre FinFET technology and beyond
The drive to deliver increasingly powerful and feature-rich integrated circuits has made
technology node scaling—the process of reducing transistor dimensions and increasing …
technology node scaling—the process of reducing transistor dimensions and increasing …
Directed self-assembly of block copolymers for sub-10 nm fabrication
Y Chen, S Xiong - International Journal of Extreme Manufacturing, 2020 - iopscience.iop.org
Directed self-assembly (DSA) emerges as one of the most promising new patterning
techniques for single digit miniaturization and next generation lithography. DSA achieves …
techniques for single digit miniaturization and next generation lithography. DSA achieves …
Quantitative three-dimensional characterization of block copolymer directed self-assembly on combined chemical and topographical prepatterned templates
Characterization of the three-dimensional (3D) structure in directed self-assembly (DSA) of
block copolymers is crucial for understanding the complex relationships between the …
block copolymers is crucial for understanding the complex relationships between the …
Sequential Brush Grafting for Chemically and Dimensionally Tolerant Directed Self-Assembly of Block Copolymers
We report a method for the directed self-assembly (DSA) of block copolymers (BCPs) in
which a first BCP film deploys homopolymer brushes, or “inks”, that sequentially graft onto …
which a first BCP film deploys homopolymer brushes, or “inks”, that sequentially graft onto …
Overview of materials and processes for lithography
RA Lawson, APG Robinson - Frontiers of nanoscience, 2016 - Elsevier
Computers and other electronic devices are an integral and ubiquitous part of the modern
world. One of the key drivers for the development, power, cost, and availability of these …
world. One of the key drivers for the development, power, cost, and availability of these …
[PDF][PDF] University of Chicago
J Chen, RA Shweder, GH Herdt - United States, 2016 - knowledge.uchicago.edu
Block copolymers consist of two or more different homopolymer chains that are covalently
bonded together. These chemically disparate components usually are not miscible with …
bonded together. These chemically disparate components usually are not miscible with …
Engineering the kinetics of directed self-assembly of block copolymers toward fast and defect-free assembly
Directed self-assembly (DSA) of block copolymers (BCPs) can achieve perfectly aligned
structures at thermodynamic equilibrium, but the self-assembling morphology can become …
structures at thermodynamic equilibrium, but the self-assembling morphology can become …
Defect mitigation and root cause studies in 14 nm half-pitch chemo-epitaxy directed self-assembly LiNe flow
H Pathangi, BT Chan, H Bayana… - Journal of Micro …, 2015 - spiedigitallibrary.org
High-defect density in thermodynamics driven directed self-assembly (DSA) flows has been
a major cause of concern for a while and several questions have been raised about the …
a major cause of concern for a while and several questions have been raised about the …