ABSTRACT β-phase gallium oxide (Ga2O3) is an emerging ultrawide bandgap (UWBG) semiconductor with a bandgap energy of∼ 4.8 eV and a predicted high critical electric field …
Single β-phase (100)(Al x Ga1–x) 2O3 thin films were successfully grown on (100) oriented β-Ga2O3 substrates via metalorganic chemical vapor deposition (MOCVD). By …
Monoclinic Ga 2 O 3 and (Al x Ga 1− x) 2 O 3 alloys are wide-band-gap semiconductors with promising applications in power electronics. Although the physical properties of monoclinic …
In this work, the structural and electrical properties of metalorganic chemical vapor deposited Si-doped β-(Al x Ga 1− x) 2 O 3 thin films grown on (010) β-Ga 2 O 3 substrates …
AFMAU Bhuiyan, L Meng, HL Huang… - physica status solidi …, 2023 - Wiley Online Library
Growths of monoclinic (AlxGa1− x) 2O3 thin films up to 99% Al contents are demonstrated via metalorganic chemical vapor deposition (MOCVD) using trimethylgallium (TMGa) as the …
In this work, we systematically investigate the effects of growth parameters on the structural and surface morphological properties of β-(Al x Ga1− x) 2O3 thin films grown on (010) β …
Phase pure β-(AlxGa1− x) 2O3 thin films are grown on (001) oriented β-Ga2O3 substrates via metalorganic chemical vapor deposition. By systematically tuning the precursor molar …
The β-(Al x Ga 1− x) 2 O 3 alloy represents an emerging ultrawide bandgap semiconductor material for applications in high-power electronics and deep ultraviolet optoelectronics. The …
Epitaxial growth of κ-phase Ga 2 O 3 thin films is investigated on c-plane sapphire, GaN-and AlN-on-sapphire, and (100) oriented yttria stabilized zirconia (YSZ) substrates via …