This paper presents a review of electrothermal micro-actuators and applications.
Electrothermal micro-actuators have been a significant research interest over the last two …

In this study, we investigate the performance of two piezoresistive micro-electro-mechanical
system (MEMS)-based silicon cantilever sensors for measuring target analytes (ie, ultrafine …

An electrothermal piezoresistive cantilever (EPC) sensor is a low-cost MEMS resonance
sensor that provides self-actuating and self-sensing capabilities. In the platform, which is of …

In this work, we present conductometric gas sensors based on p-type calcium iron oxide
(CaFe2O4) nanoparticles. CaFe2O4 is a metal oxide (MOx) with a bandgap around 1.9 eV …

In this paper, fabrication and testing of a miniaturized microcantilever-based particulate
matter detector with integrated electrostatic on-chip ultrafine particle (UFP) separation and …

A novel piezoresistive cantilever microprobe (PCM) with an integrated electrothermal or
piezoelectric actuator has been designed to replace current commercial PCMs, which …

Resonance-based sensors ordinarily show a symmetrical amplitude shape, which is
accompanied by a monotonic transition as its phase response. At its resonance state, there …

In this paper, a self-out-readable, miniaturized cantilever resonator for highly sensitive
airborne nanoparticle (NP) detection is presented. The cantilever, which is operated in the …

This study explores the application of tipless microcantilever sensors in a portable particle
detection system. The system incorporates a multi-instrument test and measurement device …

Unsteady frequency response of in-plane electro-thermal MEMS-based cantilever sensors
can cause up-/down-shifting of the resonance phase, which becomes an inhibitive factor in …