In this paper, we report the band gap tailoring of naturally available muscovite mica by ultra-
low energy (300 eV) Ar+ ion sputtering at normal ion incidence. The muscovite mica is an …

The mechanism of microwave guiding and plasma generation is investigated in a circular
waveguide with a subcutoff dimension using pulsed microwaves of 3 GHz⁠. During the …

A compact microwave driven plasma ion source for focused ion beam applications has been
developed. Several gas species have been experimented including argon, krypton, and …

The question of electromagnetic wave penetration and screening by a bounded supercritical
(⁠ ω p> ω with ω p and ω being the electron-plasma and wave frequencies, respectively) …

The buildup of a plasma produced by short-pulse (0.05–1.2 μs), high-power (60–100 kW)
microwaves is studied in a pressure range of 10 mTorr–10 Torr, by measurements of the …

A tomographic method based on the Fourier transform is used for characterizing a
microwave plasma in a multicusp (MC), in order to obtain 2D distribution of plasma …

Electrostatic beam optics for a multi-element focused ion beam (MEFIB) system comprising
of a microwave multicusp plasma (ion) source is designed with the help of two widely known …

The axial ion energy spread near a plasma meniscus for multielement focused ion beams is
investigated experimentally in atomic and molecular gaseous plasmas of krypton, argon …

The generation of quasisteady state plasmas in the power off phase, by short pulses [pulse
duration (τ p)∼ 0.5–1.2 μ s] of intense (60–100 kW) microwaves in the X band (9.45 GHz) is …

Localized wave-induced resonances are created by microwaves launched directly into a
multicusp (MC) plasma device in the k⊥ B mode, where k is the wave vector and B is the …