MEMS Pressure Sensors Design, Simulation, Manufacturing, Interface Circuits: A Review

AT Tulaev, AS Kozlov, JV Belyaev… - IEEE Sensors …, 2024 - ieeexplore.ieee.org
This article deals with the fabrication techno-logies and design techniques of pressure
sensors using various sensing element (SE) materials. The comparative analysis of different …

Bed-Based Health monitoring using pressure sensitive technology: A review

M Cohen-McFarlane, S Bennett… - IEEE Instrumentation …, 2021 - ieeexplore.ieee.org
The population of older adults (> 65 years old) is growing both in Canada and abroad. In
2018, there were 6.4 million older adults (aged 65 and over, with 1.6 million aged 80 or …

Direct inductive sensor-to-microcontroller interface circuit

Z Kokolanski, J Jordana, M Gasulla, V Dimcev… - Sensors and Actuators A …, 2015 - Elsevier
This paper proposes and analyses a microcontroller-based interface circuit for inductive
sensors with a variable self-inductance. Besides the microcontroller (μC) and the sensor, the …

A low-cost reflection mode operated microwave resonator sensor for angular displacement detection

P Regalla, AV Praveen Kumar - Journal of Electromagnetic Waves …, 2024 - Taylor & Francis
A low-cost microwave resonator sensor for angular displacement detection is proposed. The
sensor uses a strip-loaded dielectric resonator (SLDR) as the key element. The sensor …

A low-power and wide-range MEMS capacitive sensors interface IC using pulse-width modulation for biomedical applications

MS Arefin, JM Redouté, MR Yuce - IEEE Sensors Journal, 2016 - ieeexplore.ieee.org
This paper presents a low power, compact, and low-complexity pulse-width modulation-
based interface circuit for capacitive MEMS sensors. The circuit is designed using a ring …

Time-domain measurement methods for R, L and C sensors based on a versatile direct sensor-to-microcontroller interface circuit

Z Czaja - Sensors and Actuators A: Physical, 2018 - Elsevier
In the paper new time-domain measurement methods for determining values of resistive (R),
inductive (L) and capacitive (C) sensors based on a versatile direct sensor-to-microcontroller …

Magnetostrictive type inductive sensing pressure sensor

HC Chang, SC Liao, HS Hsieh, JH Wen, CH Lai… - Sensors and Actuators A …, 2016 - Elsevier
This study presents a magnetostrictive type inductive sensing pressure sensor which
consisted of a planar coil, CoFeB magnetic films, and a Si diaphragm. As the Si diaphragm …

Resolution enhancement in directly interfaced system for inductive sensors

A Asif, A Ali, MZU Abdin - IEEE Transactions on Instrumentation …, 2018 - ieeexplore.ieee.org
In this paper, a resolution enhancement method for direct interfacing of inductive sensors,
without employing analog-to-digital converter and/or external driver circuit, is presented. In …

A simple microcontroller based digitizer for differential inductive sensors

N Ramadoss, B George - 2015 IEEE International …, 2015 - ieeexplore.ieee.org
This paper presents a simple digitizer suitable for differential variable inductive/reluctance
sensors. The proposed scheme uses two digital I/O pins, a counter and a comparator of a …

Effects of inner materials on the sensitivity and phase depth of wireless inductive pressure sensors for monitoring intraocular pressure

CI Jang, KS Shin, MJ Kim, KS Yun, KH Park… - Applied Physics …, 2016 - pubs.aip.org
In this research, we developed wireless, inductive, pressure sensors with high sensitivity
and investigated the effects of the inner materials (copper or ferrite) on the performance of …