With the technological advancement in micro-electro-mechanical systems (MEMS),
microfabrication processes along with digital electronics together have opened novel …

Magnetoelectric (ME) composites of bulk structures show strong ME coupling performance,
and thus magnetoelectric bulk composites and their related devices have been attracting …

We present a highly sensitive Lorentz-force magnetic micro-sensor capable of measuring
low field values. The magnetometer consists of a silicon micro-beam sandwiched between …

This work presents a single-structure 3-axis Lorentz force magnetometer (LFM) based on an
AlN-on-Si MEMS resonator. The operation of the proposed LFM relies on the flexible …

Resonance features of slender mechanical parts of Lorentz force MEMS magnetometers are
affected by the (weakly) coupled thermo-electro-magneto-mechanical multi-physics …

In this paper, we realize two unique design topologies for Lorentz force magnetometers
(LFMs) based on radial contour (RC) mode piezoelectric-on-silicon disk resonators for the …

The magnetometer is an essential component in a number of scientific and technical
disciplines, including instrumentation and space navigation. To detect magnetic fields, a …

This paper describes the realization of piezoelectric-on-silicon lateral field Lorentz force
magnetometers (LFMs) that target operation in ambient pressure instead of vacuum …

摘要随着智能时代的到来, 磁场传感器已经广泛应用于移动设备中, 为用户提供定位和导航等
服务. 目前, 基于霍尔效应的磁场传感器和基于磁性材料的磁阻式传感器是人们普遍采用的2 …

We report a novel thermomagnetic-piezoelectric MEMS AC magnetic-field sensor. The
magnetic sensor consists of a silicon MEMS diaphragm, a piezoelectric PZT thin film, and a …