[HTML][HTML] Dielectric barrier, etch stop, and metal capping materials for state of the art and beyond metal interconnects

SW King - ECS Journal of Solid State Science and Technology, 2014 - iopscience.iop.org
Over the past decade, the primary focus for improving the performance of nano-electronic
metal interconnect structures has been to reduce the impact of resistance-capacitance (RC) …

Polymeric electronic materials for microelectronics manufacturing: A review

Q Lin - Polymer, 2023 - Elsevier
This review paper is part of a series of papers dedicated to the centenary celebration of the
American Chemical Society Division of Polymeric Materials: Science and Engineering which …

[图书][B] Design for manufacturability and statistical design: a constructive approach

M Orshansky, S Nassif, D Boning - 2007 - books.google.com
Design for Manufacturability and Statistical Design: A Constructive Approach provides a
thorough treatment of the causes of variability, methods for statistical data characterization …

Short-ranged structural rearrangement and enhancement of mechanical properties of organosilicate glasses induced by ultraviolet radiation

F Iacopi, Y Travaly, B Eyckens, C Waldfried… - Journal of Applied …, 2006 - pubs.aip.org
The short-ranged bonding structure of organosilicate glasses can vary to a great extent and
is directly linked to the mechanical properties of the thin film material. The combined action …

Physics of adhesion

WW Gerberich, MJ Cordill - Reports on Progress in Physics, 2006 - iopscience.iop.org
Adhesion physics was relegated to the lowest echelons of academic pursuit until the advent
of three seemingly disconnected events. The first, atomic force microscopy (AFM), eventually …

Coupled micromechanical model of moisture-induced damage in asphalt mixtures

S Caro, E Masad, A Bhasin, D Little - Journal of Materials in Civil …, 2010 - ascelibrary.org
The combined effect of moisture and mechanical loading on asphalt mixtures has been
recognized as one of the main causes of premature deterioration of flexible pavements. This …

Initiation and arrest of an interfacial crack in a four-point bend test

Z Huang, Z Suo, G Xu, J He, JH Prevost… - Engineering Fracture …, 2005 - Elsevier
This paper describes a framework to study the initiation and arrest of an interfacial crack,
using a combination of experiment and computation. We consider a test configuration widely …

Film property requirements for hermetic low-k a-SiOxCyNz: H dielectric barriers

SW King, D Jacob, D Vanleuven, B Colvin… - ECS Journal of Solid …, 2012 - iopscience.iop.org
Continued reduction in resistance-capacitance (RC) delays in nano-electronic Cu
interconnect structures will require new materials with increasingly lower dielectric constants …

[图书][B] Thin films and coatings: Toughening and toughness characterization

S Zhang - 2015 - books.google.com
Thin Films and Coatings: Toughening and Toughness Characterization captures the latest
developments in the toughening of hard coatings and in the measurement of the toughness …

[HTML][HTML] Creep crack growth behavior during hot water immersion of an epoxy adhesive using a spring-loaded double cantilever beam test method

K Nakamura, Y Sekiguchi, K Shimamoto, K Houjou… - Materials, 2023 - mdpi.com
Double cantilever beam (DCB) tests were conducted by immersing the specimens in
temperature-controlled water while applying a creep load using a spring. By introducing a …