Over the past few years, microelectromechanical system (MEMS) based on-chip resonators
have shown significant potential for sensing and high frequency signal processing …

An overview of microelectromechanical systems (MEMS) resonators for frequency reference
and timing applications is presented. The progress made in the past few decades in design …

This paper reports on a new type of microresonators enabled by micromachining of ion
sliced X-cut LiNbO 3 thin films. In operation, the device is excited into lateral vibrations, thus …

Abstract Microsystems (or Micro Electro Mechanical Systems, MEMS) are important
components of many popular products in the consumer market and are one of the enabling …

This paper presents an in-chip thermal-isolation technique for a micro-ovenized
microelectromechanical-system resonator. Resonators with a microoven can be used for …

A fundamental challenge for surface acoustic wave (SAW) temperature sensors is the
detection of small temperature changes on non-planar, often curved, surfaces. In this work …

Temperature fluctuations seriously damage the performance of resonant accelerometers.
Two approaches have been proposed in this paper to address this problem. In structural …

High-quality-factor Micro-Electro-Mechanical System (MEMS) resonators have been widely
used in sensors and actuators to obtain great mechanical sensitivity. The frequency drift of …

This paper describes a technical approach toward the realization of a low-power
temperature-compensated micromachined resonant strain sensor. The sensor design is …

We present, for the first time, a single-layer plate resonator with specific folded anchors
capable of reducing the temperature coefficient of frequency (TCF) by two orders of …