[HTML][HTML] Additive, subtractive and formative manufacturing of glass-based functional micro/nanostructures: a comprehensive review
H Luo, Y Zhang, J Yu, X Dong, T Zhou - Materials & Design, 2023 - Elsevier
The ever-increasing demands for miniature integrated optics, mechanics, electronics, and
biofluidics have generated great interest in high-performance glass components featuring …
biofluidics have generated great interest in high-performance glass components featuring …
Incubation effect during laser-induced backside wet etching of sapphire using high-repetition-rate near-infrared nanosecond lasers
J Long, C Zhou, Z Cao, X Xie, W Hu - Optics & Laser Technology, 2019 - Elsevier
Laser-induced backside wet etching (LIBWE) has been extensively studied in recent years
due to its high-quality processing of transparent materials. Toxic organic solutions and …
due to its high-quality processing of transparent materials. Toxic organic solutions and …
Production of submicrometre fused silica gratings using laser-induced backside dry etching technique
Laser micromachining of transparent materials is a promising technique for producing micro-
optical elements. Several types of both direct (eg ablation) and indirect (eg laser-induced …
optical elements. Several types of both direct (eg ablation) and indirect (eg laser-induced …
In-situ enhanced laser absorption in aqueous transition metal salt solution enables high-quality backside wet etching of optical glass by near-infrared lasers
A laser-induced backside wet etching technique using near-infrared laser sources (N-
LIBWE) has been proposed for high-quality micromachining of optical glass. Compared with …
LIBWE) has been proposed for high-quality micromachining of optical glass. Compared with …
Fabrication of 150 nm period grating in fused silica by two-beam interferometric laser induced backside wet etching method
Fused silica gratings with periods of 154 nm, 266 nm, and 550 nm have been fabricated by
the method of two-beam interferometric laser induced backside wet etching (TWIN-LIBWE) …
the method of two-beam interferometric laser induced backside wet etching (TWIN-LIBWE) …
Effect of liquid environment on laser-induced backside wet etching of fused silica
In laser-induced backside wet etching (LIBWE), the liquid absorbent indirectly heats the
transparent material, causing explosive phase change and cavitation. Accordingly, the …
transparent material, causing explosive phase change and cavitation. Accordingly, the …
Laser smoothing of binary gratings and multilevel etched structures in fused silica
KL Wlodarczyk, E Mendez, HJ Baker, R McBride… - Applied …, 2010 - opg.optica.org
We describe a promising approach to the processing of micro-optical components, where
CO_2 laser irradiation in raster scan is used to generate localized surface melting of binary …
CO_2 laser irradiation in raster scan is used to generate localized surface melting of binary …
Laser-induced backside wet etching: processes, results, and applications
K Zimmer, M Ehrhardt, R Böhme - Laser ablation in liquids …, 2012 - api.taylorfrancis.com
High-precision and low-damage machining of transparent materials is one of the challenges
of current laser materials processing to enable new applications in ultraprecise surface …
of current laser materials processing to enable new applications in ultraprecise surface …
Submicrometer grating fabrication in fused silica by interferometric laser-induced backside wet etching technique
Submicrometer period fused silica gratings were produced by two-beam interferometric
laser-induced backside wet etching technique (TWIN LIBWE). The fourth harmonic of a Nd …
laser-induced backside wet etching technique (TWIN LIBWE). The fourth harmonic of a Nd …
[PDF][PDF] Interpretation and modeling of laser-induced backside wet etching procedure
Laser-induced backside wet etched fused silica surfaces were characterized by X-ray
photoelectron spectroscopy (XPS) and ellipsomerty, and a new numerical model was …
photoelectron spectroscopy (XPS) and ellipsomerty, and a new numerical model was …