This contribution brings novel concept of Ag islands formation in 2D periodic arrangement
with square symmetry on special 3D surfaces–gallium phosphide (GaP) nanocones, for …

In this article we describe the electron-beam direct-write (EBDW) lithography process for the
AZ 5214E photoresist which is, besides its sensitivity to UV radiation, sensitive also to …

Symmetrical four-sided∼ 12-μm-high pyramids with 30°-tilted sides were revealed by the
etching of semi-insulating (100) GaAs substrates in 1H3PO4:× H2O2: 8H2O at∼ 25° C via …

We developed a technology of sub-micrometer Hall probes for future application in scanning
hall probe microscopy (SHPM) and magnetic force microscopy (MFM). First, the Hall probes …

We have experimentally explored a new approach to local anodic oxidation (LAO) of a
semiconductor heterostructures by means of atomic force microscopy (AFM). We have …

In this paper examples of the applicability of the standard AZ 5214E photoresist are shown.
The resist is besides its sensitivity to UV radiation sensitive also to e-beam exposure. The …

A draping technique was tested for the deposition of positive-tone AZ5214-E photo-resist
layers on non-planar (1 0 0)-oriented III–V substrates, which had a variety of three …

We report on the design, fabrication and initial mechanical testing of cantilevers with tips
based on a GaAs/In 0.485 Ga 0.515 P/AlAs heterostructure grown by metal organic chemical …

A draping technique was tested to deposit AZ5214-E resist on non-planar (100)-oriented III-
V substrates that contained various three-dimensional topographies. In each draping …

Micro-electro-mechanical systems (MEMS) have been attracting attention for research in
recent years, and nowadays play important roles as key devices in various systems. MEMS …