Position sensors with nanometer resolution are a key component of many precision imaging
and fabrication machines. Since the sensor characteristics can define the linearity …

Magnetoresistance (MR) is the variation of a material's resistivity under the presence of
external magnetic fields. Reading heads in hard disk drives (HDDs) are the most common …

This paper presents a review of the latest advances in the field of capacitive, inductive (eddy
current), and magnetic sensors, for measurement of absolute displacement. The need for …

A novel scan trajectory for high-speed scanning probe microscopy is presented in which the
probe follows a two-dimensional Lissajous pattern. The Lissajous pattern is generated by …

This paper presents a dual-stage approach to nanopositioning in which the tradeoff between
the scanner speed and range is addressed by combining a slow, large-range scanner with a …

Proximity sensing is a major requirement for intelligent robots and robotic arms to ensure
safety and closed-loop control in human–robot interactions. E-skins have received …

Nanopositioners are high-precision mechatronic devices that are capable of generating
mechanical motion with nanometer or sub-nanometer resolution. With this motion typically …

This paper presents the control system design for a piezoelectric actuator (PEA) for a high-
speed trajectory scanning application. First nonlinear hysteresis is compensated for by using …

In order to accurately control a coupled 3-DOF nano-positioning piezo-stage, this paper
designs a hybrid controller. In this controller, a hysteresis observer based on a Bouc-Wen …

Since its birth in the 1980s, nanotechnology has significantly advanced our understanding
and control of physical processes on the nanometer and subnanometer scale. Manipulation …