This paper deals with the design and simulation of a stripped-shaped piezoresistive
pressure sensor. The sensor is based on the Wheatstone bridge configuration. The …

This article deals with the fabrication techno-logies and design techniques of pressure
sensors using various sensing element (SE) materials. The comparative analysis of different …

MEMS pressure sensor has shown a remarkable change in revenue collection during the
year 2018. Due to recent growth in smart microsystem technology for automation systems …

Silicon carbide piezoresistive pressure sensor is more suitable for harsh environment due to
its wide bandgap, corrosion tolerance, excellent chemical inertness, high Young's modulus …

Pressure monitoring in various organs of the body is essential for appropriate diagnostic and
therapeutic purposes. In almost all situations, monitoring is performed in a hospital setting …

In this work, a MEMS piezoresistive micro pressure sensor (1.5× 1.5× 0.82 mm) is designed
and fabricated with SOI-based micromachining technology and assembled using anodic …

The heavily doped connecting layer is an indispensable part in the fabrication but usually an
overlooked part in the design of piezoresistive pressure sensors. In this paper, we combined …

Purpose The purpose of this research is to study the performance of piezoresistive pressure
sensors using polysilicon as the piezoresistive material, which is typically used to measure …

Purpose: Micro Electronic Mechanical System (MEMS) based pressure sensors have found
their use in multiple applications lately in the field of healthcare, automotive etc. These …

This work demonstrates an integrated thermally actuated piezoresistive micromechanical
oscillator realized using TSMC 0.35\mum CMOS-MEMS platform. The oscillation in ambient …