A stably acquiring and accurately demodulating interferogram is crucial for the
interferometer to achieve ultra-high precision and sensitivity measurements. In this study, a …

In this study, a phase-tilt-rotation iteration algorithm is proposed to realize the phase
interferometry measurement of a wafer supported by an air flotation tray with random phase …

This study demonstrates a three-cavity multiplexing vibration-resistant Fizeau interferometry
(TCM). The method injects a vibration-measurement pass (VMP), which utilizes three-cavity …

For a conventional Fizeau interferometer, accommodating both anti-vibration and
conventional measurement modes is a challenge. Here, a dual-mode Fizeau interferometer …

We report and demonstrate a dynamic Fizeau interferometer (DFI) capable of high-precision
measurements under severe vibration. The method involves two interferometric passes: a …

为解决时域相移小孔点衍射干涉仪中移相依赖昂贵压电陶瓷相移器, 且长时间采集易受环境干扰
影响的问题, 提出一种基于偏振同步相移的小孔点衍射瞬态干涉检测方法 …

This study demonstrates a three-cavity multiplexing vibration-resistant Fizeau interferometry
(TCM). The method injects a vibration-measurement pass (VMP), which utilizes three-cavity …

In this study, a robust orbital angular momentum (OAM) beams-based Fizeau interferometer
is proposed and experimentally demonstrated. It takes full advantages of the Fizeau …

The traditional interferometry method of large aperture optical elements relies on changing
the beam expansion lens and optical path structure artificially according to different test …

A two-step iterative algorithm (TSIA) immune to tilt shifts is proposed for phase extraction in
phase-shifting interferometry (PSI). The TSIA constructs a model of the least-squares …