MEMS thermal-piezoresistive resonators, thermal-piezoresistive oscillators, and sensors
L Wei, Z You, X Kuai, M Zhang, F Yang… - Microsystem Technologies, 2023 - Springer
Microelectromechanical systems (MEMS) thermal-piezoresistive resonator (TPRs) and
thermal-piezoresistive oscillator (TPO) use thermal actuation and realize feedback through …
thermal-piezoresistive oscillator (TPO) use thermal actuation and realize feedback through …
Silicon carbide-on-insulator thermal-piezoresistive resonator for harsh environment application
The thermal-piezoresistive effect in silicon (Si) has attracted great attention toward high-
performance resonant devices but still faces major challenges for harsh environment …
performance resonant devices but still faces major challenges for harsh environment …
Single-Crystal Silicon Thermal-Piezoresistive Resonators as High-Stability Frequency References
This paper reports on single-crystal silicon (Si) thermal-piezoresistive resonators (TPRs)
achieving 0.2 ppb-level frequency stability in phase-locked loop (PLL) measurements. A pair …
achieving 0.2 ppb-level frequency stability in phase-locked loop (PLL) measurements. A pair …
A Miniature Spot Position Detector Based on a Resonant Calorimeter for the Micro-Sized Spot
In this study, we introduce an innovative method for continuously tracking the positions of
small laser spots using a resonant calorimeter. The detectable heat generated by the laser …
small laser spots using a resonant calorimeter. The detectable heat generated by the laser …
Very High Frequency Stability of Single-Crystal Silicon Thermal-Piezoresistive Resonators with Phase-Locked Loop
CA Watkins, J Lee, JP McCandless… - … Conference on Solid …, 2023 - ieeexplore.ieee.org
This paper reports on a single-crystal silicon (Si) thermal-piezoresistive resonator (TPR)
achieving very high frequency stability in phase-locked loop (PLL) measurements. A pair of …
achieving very high frequency stability in phase-locked loop (PLL) measurements. A pair of …
Self-Oscillating Calorimeter Based on Thermal-Piezoresistive Resonator
For the first time, this paper demonstrates a resonant calorimeter based on thermal actuation-
piezoresistive detection resonators, employing physical self-oscillation and achieving a high …
piezoresistive detection resonators, employing physical self-oscillation and achieving a high …