Thischapterhastwomainobjectives: first, toproposeacomputer-aidedconsistent and accurate
description of the behavior of electromagnetic devices at various speeds or frequencies and …

This article proposes a new methodology dedicated to the extraction of RF parametric macro-
models for electrostatically actuated micro switches. The sensitivities of the geometric …

Modelling the dynamics of the membrane displacement in a micromachined beam fixed at
both ends for different applied voltages is important for real applications. The strong …

The linear and passive devices with distributed arameters, are modeled as multi-port
Hamiltonian (pH) systems with a finite number of ports, coupled to external structures ith …

Purpose The purpose of this paper is to propose a physics-aware algorithm to obtain radio
frequency (RF)-reduced models of micro-electromechanical systems (MEMS) switches and …