A Abrutis, T Katkus, S Stanionyte, V Kubilius… - Journal of Vacuum …, 2011 - pubs.aip.org
Possibilities to grow high-k BaHf 1− x Ti x O 3 layers were investigated by pulsed liquid
injection metal-organic chemical vapor deposition technique. Ba (thd) 2 (thd= 2, 2, 6, 6 …