Nanoimprint lithography for high-throughput fabrication of metasurfaces

DK Oh, T Lee, B Ko, T Badloe, JG Ok, J Rho - Frontiers of Optoelectronics, 2021 - Springer
Metasurfaces are composed of periodic sub-wavelength nanostructures and exhibit optical
properties that are not found in nature. They have been widely investigated for optical …

Debugging nano–bio interfaces: systematic strategies to accelerate clinical translation of nanotechnologies

M Mahmoudi - Trends in biotechnology, 2018 - cell.com
Despite considerable efforts in the field of nanomedicine that have been made by
researchers, funding agencies, entrepreneurs, and the media, fewer nanoparticle (NP) …

[HTML][HTML] Proton beam writing

F Watt, MBH Breese, AA Bettiol, JA van Kan - Materials today, 2007 - Elsevier
Proton beam (p-beam) writing is a new direct-writing process that uses a focused beam of
MeV protons to pattern resist material at nanodimensions. The process, although similar in …

Recent developments and design challenges in continuous roller micro-and nanoimprinting

JJ Dumond, H Yee Low - Journal of Vacuum Science & Technology B, 2012 - pubs.aip.org
As an emerging technology for the manufacture of micro-and nano-scale patterns,
continuous imprinting; otherwise known as roll-to-roll or roller imprinting, is attracting interest …

Application of micro-and nanoprobes to the analysis of small-sized 3D materials, nanosystems, and nanoobjects

AD Pogrebnjak, AG Ponomarev, AP Shpak… - Physics …, 2012 - iopscience.iop.org
The basic physics behind the interaction of ions with solid-state matter is discussed, with an
emphasis on the formation of interaction products between the ions and target atoms …

[图书][B] Nanoimprint lithography

H Lan, Y Ding - 2010 - books.google.com
The Nanoimprint lithography (NIL) is a novel method of fabricating micro/nanometer scale
patterns with low cost, high throughput and high resolution (Chou et al., 1996). Unlike …

Large area one‐step fabrication of three‐level multiple‐scaled micro and nanostructured nickel sleeves for roll‐to‐roll hot embossing

V Lang, A Rank, AF Lasagni - Advanced Engineering Materials, 2017 - Wiley Online Library
Direct laser interference patterning enabled the fabrication of three level multiple‐scaled
microstructures on nickel surfaces using infrared picosecond laser pulses. While the largest …

High resolution 3D NanoImprint technology: Template fabrication, application in Fabry–Pérot-filter-array-based optical nanospectrometers

X Wang, A Albrecht, HH Mai, C Woidt, T Meinl… - Microelectronic …, 2013 - Elsevier
We report a novel 3D NanoImprint methodology with very high vertical resolution well below
1 nm and a minimum surface roughness down to 0.2 nm in root mean square (rms) which is …

High resolution UV roll-to-roll nanoimprinting of resin moulds and subsequent replication via thermal nanoimprint lithography

JJ Dumond, KA Mahabadi, YS Yee, C Tan… - …, 2012 - iopscience.iop.org
UV roll-to-roll nanoimprinting at high resolution is still a relatively unexplored field of study
with far-reaching application potential. One enabling technology that is particularly worthy of …

Unconventional methods for forming nanopatterns

ME Stewart, MJ Motala, J Yao… - Proceedings of the …, 2006 - journals.sagepub.com
Nanostructured materials have become an increasingly important theme in research, in no
small part due to the potential impacts this science holds for applications in technology …