Characterization of Thin AlN/Ag/AlN-Reflector Stacks on Glass Substrates for MEMS Applications

C Behl, R Behlert, J Seiler, C Helke, A Shaporin… - Micro, 2024 - mdpi.com
Thin metal layers such as silver (Ag) are being utilized for various optical and plasmonic
applications as well as for electrical purposes, eg, as transparent electrodes in display …

Heterogeneous nanostructures fabricated via binding energy-controlled nanowelding

ZJ Zhao, M Gao, SH Hwang, S Jeon… - … applied materials & …, 2019 - ACS Publications
A novel concept for fabricating heterogeneous nanostructures based on different melting
temperatures is developed. Au–Ag composite cross-structures are fabricated by …

[PDF][PDF] Characterization of Thin AlN/Ag/AlN-Reflector Stacks on Glass Substrates for MEMS Applications. Micro 2024, 4, 142–156

C Behl, R Behlert, J Seiler, C Helke, A Shaporin… - 2024 - academia.edu
Thin metal layers such as silver (Ag) are being utilized for various optical and plasmonic
applications as well as for electrical purposes, eg, as transparent electrodes in display …