Review of the 1st EUV Light Sources Code Comparison Workshop

J Sheil, O Versolato, V Bakshi, H Scott - Atoms, 2023 - mdpi.com
We review the results of the 1 st Extreme Ultraviolet (EUV) Light Sources Code Comparison
Workshop. The goal of this workshop was to provide a platform for specialists in EUV light …

Multiply-excited states and their contribution to opacity in CO2 laser-driven tin-plasma conditions

J Sheil, OO Versolato, AJ Neukirch… - Journal of Physics B …, 2021 - iopscience.iop.org
A recent study (2020 Nat. Commun. 11 2334) has found that transitions between multiply-
excited configurations in open 4d-subshell tin ions are the dominant contributors to intense …

Laser-plasma source parameters for Kr, Gd, and Tb ions at 6.6 nm

M Masnavi, J Szilagyi, H Parchamy… - Applied Physics …, 2013 - pubs.aip.org
There is increasing interest in extreme-ultraviolet (EUV) laser-based lamps for sub-10-nm
lithography operating in the region of 6.6 nm. A collisional-radiative model is developed as a …

[PDF][PDF] Debris emission and mitigation of droplet-based laser-produced plasma sources

M Brandstätter - 2020 - research-collection.ethz.ch
The work presented in this thesis is related to droplet-based laser-produced plasma light
sources. The laser intensity on the target is optimized for light emission in the …

[PDF][PDF] FINAL EVALUATION REPORT

C Action - Romania, 2005 - cdn.forestresearch.gov.uk
Objectives The main objective of the Action is to achieve a better understanding of the
structure and biosynthesis of wood macromolecules like lignin, hemicelluloses and cellulose …