Silicon-based microelectromechanical systems (MEMS) inertial sensors have become
ubiquitous, revolutionizing motion sensing, vibration sensing and accurate positioning in …

High precision accelerometers play a vital role in the measurement of the Earth's
gravitational field. They can be used in the rotating-accelerometer-based gravity gradient …

This study proposes a highly stable differential resonant accelerometer that is monolithically
micro-machined from a piece of ultrapure, single z-cut crystal quartz. The overall structure of …

High-precision microelectromechanical inertial sensors based on spring-mass structures are
of great interests for a wide range of applications, including inertial navigation, disaster …

High-sensitivity accelerometry has historically been employed to explore Earth sciences and
advance resource-related industries, such as petroleum exploitation. The devices capable of …

Capacitive Micro-Electro-Mechanical Systems (MEMS) accelerometers for quasi-static
applications are susceptible to vibration rectification error (VRE) when the ambient AC …

Introduction Thermoelastic damping (TED) is a significant contributor to mechanical
damping in micro-sized structures. Design variables to tune damping and natural frequency …

The work presents a novel system formed by a frequency-modulated
microelectromechanical system (MEMS) accelerometer and an associated circuit which …

By establishing the nonlinear vibration model of a resonant accelerometer, this article
analyzes the effects of mechanical nonlinearity and electrostatic nonlinearity on the output …

This work introduces a new class of MEMS accelerometers, combining a sensing scheme
based on continuous mode-reversal electrostatic frequency modulation (FM) with a self …