Piezoelectric MEMS resonators: A review
Since two decades piezoelectric MEMS resonator research has been making a headway by
leaps and bounds in multiple fronts such as micro/nanofabrication techniques, device and …
leaps and bounds in multiple fronts such as micro/nanofabrication techniques, device and …
Integrating mems and ics
The majority of microelectromechanical system (MEMS) devices must be combined with
integrated circuits (ICs) for operation in larger electronic systems. While MEMS transducers …
integrated circuits (ICs) for operation in larger electronic systems. While MEMS transducers …
Three-dimensional battery architectures
The worldwide thirst for portable consumer electronics in the 1990s had an enormous
impact on portable power. Lithium ion batteries, in which lithium ions shuttle between an …
impact on portable power. Lithium ion batteries, in which lithium ions shuttle between an …
Dynamic pull-in phenomenon in MEMS resonators
AH Nayfeh, MI Younis, EM Abdel-Rahman - Nonlinear dynamics, 2007 - Springer
We study the pull-in instability in microelectromechanical (MEMS) resonators and find that
characteristics of the pull-in phenomenon in the presence of AC loads differ from those …
characteristics of the pull-in phenomenon in the presence of AC loads differ from those …
Mechanically corner-coupled square microresonator array for reduced series motional resistance
MU Demirci, CTC Nguyen - Journal of Microelectromechanical …, 2006 - ieeexplore.ieee.org
Substantial reductions in vibrating micromechanical resonator series motional resistance R
x have been attained by mechanically coupling and exciting a parallel array of corner …
x have been attained by mechanically coupling and exciting a parallel array of corner …
A low-voltage and low-power RF MEMS series and shunt switches actuated by combination of electromagnetic and electrostatic forces
This paper reports new RF microelectromechanical systems (MEMS) switches actuated by
the combination of electromagnetic and electrostatic forces for low-voltage and low-power …
the combination of electromagnetic and electrostatic forces for low-voltage and low-power …
Characterization of micromechanical structures using white-light interferometry
C O'Mahony, M Hill, M Brunet, R Duane… - Measurement …, 2003 - iopscience.iop.org
As microelectromechanical systems (MEMS) move rapidly towards commercialization, the
issue of mechanical characterization has emerged as a major consideration in device …
issue of mechanical characterization has emerged as a major consideration in device …
On the dynamic pull-in of electrostatic actuators with multiple degrees of freedom and multiple voltage sources
D Elata, H Bamberger - Journal of Microelectromechanical …, 2006 - ieeexplore.ieee.org
This study considers the dynamic response of electrostatic actuators with multiple degrees of
freedom that are driven by multiple voltage sources. The critical values of the applied …
freedom that are driven by multiple voltage sources. The critical values of the applied …
A capacitive RF power sensor based on MEMS technology
LJ Fernandez, RJ Wiegerink, J Flokstra… - Journal of …, 2006 - iopscience.iop.org
Wideband 100 kHz–4 GHz power sensors are presented, which are based on sensing the
electrostatic force between an RF signal line and a suspended membrane. The electrostatic …
electrostatic force between an RF signal line and a suspended membrane. The electrostatic …
Microelectromechanical resonators for radio frequency communication applications
J Basu, TK Bhattacharyya - Microsystem technologies, 2011 - Springer
Over the past few years, microelectromechanical system (MEMS) based on-chip resonators
have shown significant potential for sensing and high frequency signal processing …
have shown significant potential for sensing and high frequency signal processing …