The growing demand for electronic devices, smart devices, and the Internet of Things
constitutes the primary driving force for marching down the path of decreased critical …

Manufacturing firms often struggle to attain the optimum balance of environmental,
economic, and social goals. Sustainable Manufacturing (SM) is one of the ways to balance …

摘要在线测量检测技术与装备是保证集成电路(IC) 制造质量和良率的唯一有效技术手段, 在IC
制造过程中必须对IC 纳米结构的关键尺寸, 套刻误差, 以及缺陷等进行快速, 非破坏 …

Continuous and digitized monitoring and automated inspection are key parts of modern
manufacturing and sustainment of aging infrastructure. The growing demand for these …

We present an efficient machine learning framework for detection and classification of
nanoparticles on surfaces that are detected in the far-field with coherent Fourier …

Visual inspection for defects has been predominantly used in all realms of the manufacturing
sector. MEMS substrates and circuits face multiple challenges during the fabrication phase …

Automated optical inspection (AOI) is a visual defect inspection system. The semiconductor
industry has a strong dependency on AOI for defects screening. Conventional AOI is …

With the rapid growth in the semiconductor industry, it is becoming critical to detect and
classify increasingly smaller patterned defects. Recently machine learning, including deep …

The Metrology Chapter identifies emerging measurement challenges from devices, systems,
and integration of new materials in the semiconductor industry and describes research and …

The rapid growth of the semiconductor industry has made it increasingly critical to detect and
classify increasingly smaller patterned defects with high certainty. Machine learning has …