Further development of GaN/AlGaN based optoelectronic devices requires optimization of the p-type material growth process. In particular, uncontrolled diffusion of Mg dopants may …
High-Al-content AlxGa1− xN layers, x∼ 0.72, have been grown by metal organic chemical vapour deposition (MOCVD) at a temperature ranging from 1000 to 1100° C, together with …