Cantilever-like micromechanical sensors

A Boisen, S Dohn, SS Keller, S Schmid… - Reports on Progress in …, 2011 - iopscience.iop.org
The field of cantilever-based sensing emerged in the mid-1990s and is today a well-known
technology for label-free sensing which holds promise as a technique for cheap, portable …

Cantilever transducers as a platform for chemical and biological sensors

NV Lavrik, MJ Sepaniak, PG Datskos - Review of scientific instruments, 2004 - pubs.aip.org
Since the late 1980s there have been spectacular developments in micromechanical or
microelectro-mechanical (MEMS) systems which have enabled the exploration of …

Semiconductor piezoresistance for microsystems

AA Barlian, WT Park, JR Mallon… - Proceedings of the …, 2009 - ieeexplore.ieee.org
Piezoresistive sensors are among the earliest micromachined silicon devices. The need for
smaller, less expensive, higher performance sensors helped drive early micromachining …

Chemical detection with a single-walled carbon nanotube capacitor

ES Snow, FK Perkins, EJ Houser, SC Badescu… - Science, 2005 - science.org
We show that the capacitance of single-walled carbon nanotubes (SWNTs) is highly
sensitive to a broad class of chemical vapors and that this transduction mechanism can form …

Smart single-chip gas sensor microsystem

C Hagleitner, A Hierlemann, D Lange, A Kummer… - Nature, 2001 - nature.com
Research activity in chemical gas sensing is currently directed towards the search for highly
selective (bio) chemical layer materials, and to the design of arrays consisting of different …

Formation of coastline features by large-scale instabilities induced by high-angle waves

A Ashton, AB Murray, O Arnoult - Nature, 2001 - nature.com
Alongshore sediment transport that is driven by waves is generally assumed to smooth a
coastline. This assumption is valid for small angles between the wave crest lines and the …

Complementary metal oxide semiconductor cantilever arrays on a single chip: mass-sensitive detection of volatile organic compounds

D Lange, C Hagleitner, A Hierlemann… - Analytical …, 2002 - ACS Publications
The sensing behavior of polymer-coated resonant cantilevers for mass-sensitive detection of
volatile organic compounds was investigated. Industrial complementary metal oxide …

Microfabrication techniques for chemical/biosensors

A Hierlemann, O Brand, C Hagleitner… - Proceedings of the …, 2003 - ieeexplore.ieee.org
Microfabrication processes for chemical and biochemical sensors are reviewed. Standard
processing steps originating from semiconductor technology are detailed, and specific …

Nanomechanical membrane-type surface stress sensor

G Yoshikawa, T Akiyama, S Gautsch, P Vettiger… - Nano …, 2011 - ACS Publications
Nanomechanical cantilever sensors have been emerging as a key device for real-time and
label-free detection of various analytes ranging from gaseous to biological molecules. The …

CMOS interfacing for integrated gas sensors: A review

JW Gardner, PK Guha, F Udrea… - IEEE Sensors …, 2010 - ieeexplore.ieee.org
Modern gas sensor technology is becoming an important part of our lives. It has been
applied within the home (monitoring CO levels from boilers), the workplace (eg, checking …