Heterogeneous domain adaptation and equipment matching: DANN-based Alignment with Cyclic Supervision (DBACS)
N Gentner, GA Susto - Computers & Industrial Engineering, 2024 - Elsevier
Process monitoring and control are essential in modern industries for ensuring high quality
standards and optimizing production performance. These technologies have a long history …
standards and optimizing production performance. These technologies have a long history …
Enhancing Scalability of Deep Learning Based Approaches in Semiconductor Manufacturing
N Gentner - 2023 - research.unipd.it
In this thesis the necessity, the possibilities but also the difficulties of scaling and
generalization of machine learning models in the context of process control in …
generalization of machine learning models in the context of process control in …
Deep auto-encoder for equipment health monitoring and fault detection in semiconductor and display process equipment tools
HAO Heng, S Bhaviripudi, S Gayaka - US Patent 11,948,061, 2024 - Google Patents
Implementations described herein generally relate to a method for detecting anomalies in
time-series traces received from sensors of manufacturing tools. A server feeds a set of …
time-series traces received from sensors of manufacturing tools. A server feeds a set of …
Deep auto-encoder for equipment health monitoring and fault detection in semiconductor and display process equipment tools
HAO Heng, S Bhaviripudi, S Gayaka - US Patent 11,568,198, 2023 - Google Patents
Implementations described herein generally relate to a method for detecting anomalies in
time-series traces received from sensors of manufacturing tools. A server feeds a set of …
time-series traces received from sensors of manufacturing tools. A server feeds a set of …