Virtual metrology (VM) involves estimating a product's quality directly from production
process data without physically measuring it. This enables the product quality of each unit of …

Abstract Advanced Process Control (APC) has become an increasingly pressing issue for
the semiconductor industry, particularly in the new era of sub-5nm process technology. To …

Business intelligence (BI) is the process of transforming raw data into useful information for
more effective strategic, operational insights, and decision-making purposes so that it yields …

In semiconductor manufacturing processes, virtual metrology (VM) has been investigated as
a promising tool to predict important characteristics of products. Although partial least …

Resiliency and improved state-awareness of modern critical infrastructures, such as energy
production and industrial systems, is becoming increasingly important. As control systems …

There is now an emerging need for an efficient modeling strategy to develop a new
generation of monitoring systems. One method of approaching the modeling of complex …

Soft sensors attempt to predict the key quality variables that are infrequently available using
the sensor and manipulated variables that are readily available. Since only limited amount …

In the high-tech industries, on-line quality monitoring on each workpiece under processing is
required to ensure process stability and improve yield rate. However, conducting workpiece …

In the context of Industry 4.0, many production scenarios utilise sensors to monitor
manufacturing processes, resulting in massive data that can be leveraged to build machine …

Automatic virtual metrology (AVM) is the highest-level technology for virtual metrology (VM)
applications from the perspective of automation, which could facilitate fast factory-wide …