Presents the mathematical framework, technical language, and control systems know-how
needed to design, develop, and instrument micro-scale whole-angle gyroscopes This …

Electrostatic microactuators with large vertical scanning range (several hundred
micrometers) at high frequency (hundreds to thousands of hertz) and chips' sizes compatible …

A large-stroke (8 µm) parametric resonator excited by an in-plane'shaped-finger'electrostatic
comb drive is fabricated using a 15 µm thick silicon-on-insulator microelectromechanical …

We report a new type of MEMS degenerate mode lumped mass gyroscope architecture. The
Dual Foucault Pendulum (DFP) gyroscope consists of two dynamically equivalent …

This paper presents a novel MEMS tunable resonator that draws inspiration from the folded
beam structure in its comb drive resonator design. Conventional electrostatic comb-drive …

This chapter provides an overview of parametric excitation as it pertains to resonant
micro/nanosystems. The chapter highlights the feasible physical sources of parametric …

We present our initial results toward understanding the interaction of temperature and stress
on resonant frequencies of a matched-mode SOI-MEMS gyroscope. We also validate a new …

We demonstrate a novel technique for operating a differentially-driven and differentially-
sensed double-sided comb-drive resonator. The resonator is driven by application of two out …

The presented paper describes the design, simulation, and analysis of a novel tunable comb-
drive actuator that aims to increase the range of tuning resonance frequency while reducing …

This Ph. D. dissertation reports novel fabrication processes and architectures for
implementation of Rate Integrating Gyroscopes at micro-scale. Majority of the focus is …