In‐Volume Laser Direct Writing of Silicon—Challenges and Opportunities

M Chambonneau, D Grojo, O Tokel… - Laser & Photonics …, 2021 - Wiley Online Library
Laser direct writing is a widely employed technique for 3D, contactless, and fast
functionalization of dielectrics. Its success mainly originates from the utilization of ultrashort …

Ultrafast laser micro-and nano-processing with nondiffracting and curved beams: invited paper for the section: hot topics in ultrafast lasers

F Courvoisier, R Stoian, A Couairon - Optics & Laser Technology, 2016 - Elsevier
Ultrafast laser materials processing has undergone an important change with the
development of non-diffracting beams. These beams enable overcoming many of the …

Improved laser glass cutting by spatio-temporal control of energy deposition using bursts of femtosecond pulses

K Mishchik, R Beuton, OD Caulier, S Skupin… - Optics …, 2017 - opg.optica.org
We demonstrate the advantage of combining non-diffractive beam shapes and femtosecond
bursts for volume laser processing of transparent materials. By re-distribution of the single …

Ultrafast Bessel beams: advanced tools for laser materials processing

R Stoian, MK Bhuyan, G Zhang, G Cheng… - Advanced Optical …, 2018 - degruyter.com
Ultrafast Bessel beams demonstrate a significant capacity of structuring transparent
materials with a high degree of accuracy and exceptional aspect ratio. The ability to localize …

Volume photoinscription of glasses: three-dimensional micro-and nanostructuring with ultrashort laser pulses

R Stoian - Applied Physics A, 2020 - Springer
Ultrafast laser photoinscription of optical materials has seen a strong development in the
recent years for a range of applications in integrated photonics. Fueled by its capability to …

High aspect ratio micro-explosions in the bulk of sapphire generated by femtosecond Bessel beams

L Rapp, R Meyer, R Giust, L Furfaro, M Jacquot… - Scientific Reports, 2016 - nature.com
Femtosecond pulses provide an extreme degree of confinement of light matter-interactions
in high-bandgap materials because of the nonlinear nature of ionization. It was recognized …

Tubular filamentation for laser material processing

C Xie, V Jukna, C Milián, R Giust, I Ouadghiri-Idrissi… - Scientific reports, 2015 - nature.com
An open challenge in the important field of femtosecond laser material processing is the
controlled internal structuring of dielectric materials. Although the availability of high energy …

Millijoule femtosecond micro-Bessel beams for ultra-high aspect ratio machining

S Mitra, M Chanal, R Clady, A Mouskeftaras, D Grojo - Applied optics, 2015 - opg.optica.org
We report on a functional experimental design for Bessel beam generation capable of
handling high-energy ultrashort pulses (up to 1.2 mJ per pulse of 50 fs duration). This allows …

Glass dicing with elliptical Bessel beam

J Dudutis, R Stonys, G Račiukaitis, P Gečys - Optics & Laser Technology, 2019 - Elsevier
In this paper the possibility to optimize the glass dicing process by controlling the axicon-
generated Bessel beam ellipticity is presented. Single-shot intra-volume modifications in …

Super-efficient drilling of metals with ultrafast non diffractive laser beams

HD Nguyen, E Moreno, A Rudenko, N Faure… - Scientific Reports, 2022 - nature.com
A highly efficient drilling process is found in non-transparent metallic materials enabled by
the use of non-diffractive ultrafast Bessel beams. Applied for deep drilling through a 200 μm …