A large-stroke (8 µm) parametric resonator excited by an in-plane'shaped-finger'electrostatic
comb drive is fabricated using a 15 µm thick silicon-on-insulator microelectromechanical …

Parametric resonance provides a sharp jump in resonance amplitude at the bifurcation
setpoint and is, therefore, ideal for ultrasensitive detection of mass or stress shifts that modify …