Similarity theory and scaling laws for low-temperature plasma discharges: A comprehensive review
Similarity theory and scaling laws determine how physical laws remain the same when
control parameters are changed, which is essential for the correlation, prediction, and …
control parameters are changed, which is essential for the correlation, prediction, and …
Non-equilibrium in low-temperature plasmas
F Taccogna, G Dilecce - The European Physical Journal D, 2016 - Springer
The wide range of applications of cold plasmas originates from their special characteristic of
being a physical system out of thermodynamic equilibrium. This property enhances its …
being a physical system out of thermodynamic equilibrium. This property enhances its …
Electron dynamics in low pressure capacitively coupled radio frequency discharges
In low temperature plasmas, the interaction of the electrons with the electric field is an
important current research topic that is relevant for many applications. Particularly, in the low …
important current research topic that is relevant for many applications. Particularly, in the low …
Higher harmonics in multipactor induced plasma ionization breakdown near a dielectric surface
In this Letter, the novel physics of higher harmonic (HH) generation of the normal electric
field near a dielectric surface is reported in multipactor induced plasma ionization …
field near a dielectric surface is reported in multipactor induced plasma ionization …
Spatio-temporal analysis of the electron power absorption in electropositive capacitive RF plasmas based on moments of the Boltzmann equation
Power absorption by electrons from the space-and time-dependent electric field represents
the basic sustaining mechanism of all radio-frequency driven plasmas. This complex …
the basic sustaining mechanism of all radio-frequency driven plasmas. This complex …
Multi-diagnostic experimental validation of 1d3v PIC/MCC simulations of low pressure capacitive RF plasmas operated in argon
The particle-in-cell/Monte Carlo collisions (PIC/MCC) simulation approach has become a
standard and well-established tool in studies of capacitively coupled radio frequency (RF) …
standard and well-established tool in studies of capacitively coupled radio frequency (RF) …
Electron dynamics in planar radio frequency magnetron plasmas: II. Heating and energization mechanisms studied via a 2d3v particle-in-cell/Monte Carlo code
D Eremin, B Berger, D Engel, J Kallähn… - Plasma Sources …, 2023 - iopscience.iop.org
The present work investigates electron transport and heating mechanisms using an (r, z)
particle-in-cell simulation of a typical rf-driven axisymmetric magnetron discharge with a …
particle-in-cell simulation of a typical rf-driven axisymmetric magnetron discharge with a …
Spatial flux and energy asymmetry in a low pressure capacitively coupled plasma discharge excited by sawtooth waveform: A harmonic study
Plasma asymmetry generation in capacitively coupled plasma (CCP) discharges provides
control over vital parameters that are useful in many plasma processing applications. In this …
control over vital parameters that are useful in many plasma processing applications. In this …
Voltage waveform tailoring in radio frequency plasmas for surface charge neutralization inside etch trenches
The etching of sub micrometer high-aspect-ratio (HAR) features into dielectric materials in
low pressure radio frequency technological plasmas is limited by the accumulation of …
low pressure radio frequency technological plasmas is limited by the accumulation of …
High-energy ballistic electrons in low-pressure radio-frequency plasmas
This work demonstrates the presence of a small number of high-energy ballistic electrons
(HEBEs) that originate from secondary electrons in low-pressure radio-frequency (rf) …
(HEBEs) that originate from secondary electrons in low-pressure radio-frequency (rf) …