Along with the electrostatic force and fringing field effect, the van der Waals (vdW) force acts on the electrostatically actuated nano-cantilever (EANC) when the separation between …
H Moeenfard, S Maleki - Proceedings of the Institution of …, 2017 - journals.sagepub.com
This paper presents a new approach based on Extended Kantorovich Method to simulate the static response of micro-plates to electrostatic actuation. The presented model accounts …
KS Pakhare, RP Shimpi… - International Journal for …, 2023 - Taylor & Francis
The van der Waals (vdW) force, along with the electrostatic force and the first-order fringing field effect, act on the electrostatically actuated nano-cantilever (EANC) when the gap …
Besides one dimensional beam-type MEMS, two dimensional electrically actuated rectangular micro-plates have lots of applications in micro-engineering. However, there exist …
Abstract Reyes, Christopher I., Secondary Resonances of Electrostatically Actuated MEMS Cantilevers. Master of Science Engineering (MSE), May 2019, 180 pp., 4 tables, 157 figures …
M Botello, DI Caruntu - … Technical Conferences and …, 2018 - asmedigitalcollection.asme.org
Casimir effect on superharmonic resonance of electrostatically actuated bio-nano-electro- mechanical system (Bio-NEMS) circular plate resonator sensor is investigated. The plate …
The behavior of nano and micro-electromechanical systems (N/MEMS) cantilever beams under electrostatic actuation is studied. The cantilever system is actuated by soft AC voltage …
In view of the difficulties arisen in determining the solutions of linear eigenvalue problems of fully-clamped rectangular micro-plates, the size-dependent pull-in analysis of such systems …