[PDF][PDF] Structural diagram of automated quality control process of silicon wafers during their surface shaping

I Nevlyudov, I Botsman, S Tesliuk - 2021 - openarchive.nure.ua
Introduction. Currently the task of finding alternative energy sources is one of the most
urgent tasks not only in Ukraine, but throughout the world. In Ukraine several types of energy …

AUTOMATION OF THE POLYCRYSTALLINE SILICON SURFACE FORMATION CONTROL PROCESS

І Nevlyudov, S Tesliuk - International Independent Scientific Journal​, 2021 - elibrary.ru
In the article the process of control of polycrystalline silicon surface formation is researched.
It is proposed to use the thickness control method for the semiconductor wafer in the …

[PDF][PDF] STRUCTURAL DIAGRAM OF AUTOMATED QUALITY CONTROL PROCESS OF SILICON WAFERS DURING THEIR SURFACE SHAPING

N Igor, B Iryna, T Serhii - EDITORIAL BOARD, 2021 - dspace.uzhnu.edu.ua
Conclusion. The control process automation of the surface quality and silicon polycrystals
thickness is of great importance for the entire further technological operations complex of the …

[引用][C] MEDICAL SCIENCES

I Buzdugan, A Blaschuk, K Maleshko